A Novel Microcantilever Device with Nano-Interdigitated Electrodes (Nano-IDEs) for Biosensing Applications


Article Preview

We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and selective functionalization of nano-IDEs for biosensing applications. The nano-IDEs play a role in precisely addressing capture molecules to a specific region on a microcantilever. This leads to a detectable surface stress due to the binding of target molecules. 70~500 nm-wide gold (Au) nano- IDEs are fabricated on a low-stress SiNx microcantilever with dimensions of 100~600 μm in length, and 15~60 μm in width, with a 0.5 μm thickness using electron beam lithography and bulk micromachining. 32~96 nm-thick streptavidin is selectively deposited on one side of nano-IDEs using cyclic voltammetry at a scan rate of 0.1 V/s with a range of -0.2~0.7 V during 1~5 cycles. The selective deposition of streptavidin is confirmed by fluorescence microscopy and atomic force microscopy (AFM).



Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim




J. A. Lee et al., "A Novel Microcantilever Device with Nano-Interdigitated Electrodes (Nano-IDEs) for Biosensing Applications", Key Engineering Materials, Vols. 326-328, pp. 1359-1362, 2006

Online since:

December 2006




[1] H. P. Lang, M. Hegner, E. Meyer, Ch. Gerber: Nanotechnology Vol. 13 (2002), p. R29-R36.

[2] M. Yue, H. Lin, D. E. Dedrick, S. Satyanarayana, A. Majumdar, A. S. Bedekar, J. W. Jenkins, S. Sundaram: J. Microelectromech. Syst. Vol. 13(2) (2004), p.290.

DOI: https://doi.org/10.1109/jmems.2003.823216

[3] M. Alvarez, A. Calle, J. Tamayo, L. M. Lechuga, A. Abad, A. Montoya: Biosens. Bioelectron. Vol. 18 (2003), p.649.

[4] C. A. Savran, A. W. Sparks, J. Sihler, J. Li, W. C. Wu, and D. E. Berlin: J. Microelectromech. Syst. Vol. 11(6) (2002), p.703.

[5] Y. J. Wright, A. K. Kar, Y. W. Kim, C. Scholz, and M. A. George: Sens. Actuator B Vol. 107 (2005), p.242.

[6] S. Cosnier: Biosens. Bioelectron. Vol. 14 (1999), p.443.

[7] M. I. Rodríguez, E. C. Alocilja: IEEE Sensors J. Vol. 5(4) (2005), p.733.

[8] R. Hölzel, N. Gajovic-Eichelmann, F. F. Bier: Biosens. Bioelectron. Vol. 18 (2003), p.555.