MEMS-Based Fabrication of Multi-Walled Carbon Nanotube pH Sensor
In this paper, We presents experimental results that demonstrate the pH sensing capability of MW-CNTs. High-density, well-aligned carbon nanotubes, which are MW-CNTs and vertically aligned on a large area of substrate, has been synthesized. The absorption of different range of pH buffer solution in the MW-CNTs changes the conductivity of the MW-CNTs at room temperature. A MEMS-based fabrication process was developed to fabricate a device where MWCNTs based sensing material was precisely assembled pattern.
Soon-Bok Lee and Yun-Jae Kim
K. S. Lee et al., "MEMS-Based Fabrication of Multi-Walled Carbon Nanotube pH Sensor", Key Engineering Materials, Vols. 326-328, pp. 1367-1370, 2006