Large Displacement Out-Of-Plane Bimorph Actuator for Optical Application
A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.
Soon-Bok Lee and Yun-Jae Kim
W. K. Jeung et al., "Large Displacement Out-Of-Plane Bimorph Actuator for Optical Application", Key Engineering Materials, Vols. 326-328, pp. 1383-1386, 2006