Design and Fabrication of a Flexural Plate Wave Accelerometer


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We design and fabricate a novel flexural plate wave (FPW) accelerometer which has wide working range and improved sensitivity. A bridge as well as a rectangular diaphragm with a proof mass has been considered for a wave propagation medium to enhance the performance. The performance improvement is also verified with the bridge structure and the existence of the proof mass in the simulation results.



Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim




J. S. Lee et al., "Design and Fabrication of a Flexural Plate Wave Accelerometer", Key Engineering Materials, Vols. 326-328, pp. 241-244, 2006

Online since:

December 2006




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