Design and Fabrication of a Flexural Plate Wave Accelerometer
We design and fabricate a novel flexural plate wave (FPW) accelerometer which has wide working range and improved sensitivity. A bridge as well as a rectangular diaphragm with a proof mass has been considered for a wave propagation medium to enhance the performance. The performance improvement is also verified with the bridge structure and the existence of the proof mass in the simulation results.
Soon-Bok Lee and Yun-Jae Kim
J. S. Lee et al., "Design and Fabrication of a Flexural Plate Wave Accelerometer", Key Engineering Materials, Vols. 326-328, pp. 241-244, 2006