Design and Fabrication of a Flexural Plate Wave Accelerometer

Abstract:

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We design and fabricate a novel flexural plate wave (FPW) accelerometer which has wide working range and improved sensitivity. A bridge as well as a rectangular diaphragm with a proof mass has been considered for a wave propagation medium to enhance the performance. The performance improvement is also verified with the bridge structure and the existence of the proof mass in the simulation results.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

241-244

DOI:

10.4028/www.scientific.net/KEM.326-328.241

Citation:

J. S. Lee et al., "Design and Fabrication of a Flexural Plate Wave Accelerometer", Key Engineering Materials, Vols. 326-328, pp. 241-244, 2006

Online since:

December 2006

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Price:

$35.00

[1] Stauffer Jean-Michel, Position Location and Navigation Symposium, April 2004, pp.78-82.

[2] SeonHo Seok, Solid-State and Integrated Circuits Tech., Vol. 3, Oct. 2004, pp.1812-1815.

[3] Stuart W. Wenzel, IEEE Trans. on Electron Devices, Vol. 35, No. 6, June 1988, pp.27-30.

[4] Marc S. Weinberg, Journal of MEMS, Vol. 9, No. 3, Sep. 2000, pp.370-379.

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