A Novel PDMS Valveless Micropump with a Circular Lightweight Piezo-Composite Actuator


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This paper presents a design and performance evaluation of a valveless micropump fabricated from polydimethylsiloxane (PDMS) based on molding techniques. A circular lightweight piezo-composite actuator (LIPCA) was successfully developed for the actuating diaphragm of the micropump. The LIPCA is a composite actuator designed and fabricated with piezoceramics in combination with carbon fabric and glass epoxy. Numerical and experimental methods were used to investigate the performance of the circular LIPCA. The LIPCA was glued to a PDMS membrane to form the diaphragm of the micropump. The diaphragm has several advantages, such as high displacement, dome-shaped deformation and geometrically independent actuation profile. The diaphragm based on a LIPCA 9 mm in diameter produces a deflection of 27 μm at the applied voltage of ± 200 V and a frequency of 1 Hz. The micropump has a maximum water flow rate of 0.95 ml/min and a maximum backpressure of 3.8 kPa. The merits of the present micropump are low cost, ease of manufacturing and high level of effectiveness. The proposed LIPCA is proven to be a promising alternative to the conventional piezoelectric actuator used in micropumps.



Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim




T. T. Nguyen and N. S. Goo, "A Novel PDMS Valveless Micropump with a Circular Lightweight Piezo-Composite Actuator", Key Engineering Materials, Vols. 326-328, pp. 245-248, 2006

Online since:

December 2006




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