In this paper, the behavior of microparticles subjected to the AC electric fields generated by planar microelectrode systems is studied. Microelectrodes including interdigitated array, castellated array, and jagged array are constructed using microfabrication techniques. Micron-sized latex beads are used to study their movements. Positive and negative dielectrophoresis (DEP) are studied. In the interdigitated electrodes, particles experiencing n-DEP are levitated stably to certain heights where the vertical DEP force is balanced by the gravitational force. The levitation heights of the particles are measured using the consecutively focusing method. The results provide significant instructions for the dielectrophoretic manipulation and separation of bioparticles.