Fabrication of Organic Thin Film Transistor(OTFT) Array by Using Nanoprinting Process


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The flexible organic thin film transistor(OTFT) array to use as a switching device for an organic light emitting diode(OLED) was designed and fabricated in the nanocontact printing and low-temperature process. The gate, source, and drain electrode patterns of OTFT were fabricated by nanocontact printing process. And dielectric layer of parylene and organic active semiconductor layer of pentacene formed at room temperature or at a temperature lower than 40. The nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even submicron size, and reduced the fabrication process by 10 steps compared with photolithography. Since the process was done in room temperature, there was no pattern shrinkage, transformation, and bending problem appeared. Also, it was possible to improve electric field mobility, to decrease contact resistance, to increase close packing of molecules by SAM, and to reduce threshold voltage by using a parylene.



Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim




J. D. Jo et al., "Fabrication of Organic Thin Film Transistor(OTFT) Array by Using Nanoprinting Process", Key Engineering Materials, Vols. 326-328, pp. 385-388, 2006

Online since:

December 2006




[1] H. Klauk et al. Molecular Nanoelectronics(2003) 291~309.

[2] R. Ben Chaabane et al. Thin Solid Films 427(2003) 371-376.

[3] J.A. Rogers et al. Synthetic Metals 115(2005) 5-11.

[4] C. Pannemann et al. Microelectronic Engineering 67-68(2003) 845-852.

[5] M. Leufgen et al. Appl. Phys. Lett., 84, 1582(2004).

[6] A.P. Kam et al, Microelectronic Engineering, Vol. 73-74, (2004) pp.809-813.

[7] Jeongdai Jo et al, Proc. of KSPE Conf., pp.180-183, (2005).

[8] Jeongdai Jo et al, Proc. of Int. Conf. on ADMD2005, 146-147, (2005).

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