Optical Interferometric Inspection of Surface Contour of MEMS-Components
In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.
Soon-Bok Lee and Yun-Jae Kim
C. J. Tay, S.H. Wang, C. Quan, "Optical Interferometric Inspection of Surface Contour of MEMS-Components", Key Engineering Materials, Vols. 326-328, pp. 47-50, 2006