Optical Interferometric Inspection of Surface Contour of MEMS-Components


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In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.



Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim




C. J. Tay et al., "Optical Interferometric Inspection of Surface Contour of MEMS-Components", Key Engineering Materials, Vols. 326-328, pp. 47-50, 2006

Online since:

December 2006




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