Optical Interferometric Inspection of Surface Contour of MEMS-Components

Abstract:

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In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

47-50

DOI:

10.4028/www.scientific.net/KEM.326-328.47

Citation:

C. J. Tay, S.H. Wang, C. Quan, "Optical Interferometric Inspection of Surface Contour of MEMS-Components", Key Engineering Materials, Vols. 326-328, pp. 47-50, 2006

Online since:

December 2006

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Price:

$35.00

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