Advanced Technologies for Estimation of Nonlinear Ultrasonic Parameter

Abstract:

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This paper proposes an advanced signal processing technique for the precise estimation of a nonlinear ultrasonic parameter, based on power spectral and bispectral analysis. The power spectrum and bispectrum estimation of the pulse-like ultrasonic signal used in the commercial SAM (scanning acoustic microscopy) equipment is especially considered in this study. The usefulness of the proposed estimation is confirmed by experiments for a Newton ring with a continuous air gap and a real semiconductor sample with local delaminations. The results show that the nonlinear parameter obtained by the proposed method had a good correlation with the delamination.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

673-676

DOI:

10.4028/www.scientific.net/KEM.326-328.673

Citation:

K. Y. Jhang, K. Sasaki, J. Ha, H. Tanaka, "Advanced Technologies for Estimation of Nonlinear Ultrasonic Parameter", Key Engineering Materials, Vols. 326-328, pp. 673-676, 2006

Online since:

December 2006

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Price:

$35.00

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