Investigation of Thermo-Chemical Polishing of CVD Diamond Film


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ZnO/Diamond structure has attracted a lot of attentions and heavy investment recently just because diamond has the capability of producing very high surface acoustic wave (around 10,000m/s). In this present study, the microwave chemical vapor deposition (CVD) method was employed to produce diamond films on silicon single crystal. Thermo-chemical polishing experiments were then conducted on the obtained diamond films. The underlying material removal mechanisms, microstructure of the machined surface and related machining conditions were also investigated. Thermo-chemical polishing was proved to be able to remove the diamond film very effectively (4.8μm deep of diamond film was removed in 30 minutes when polishing at 550oC and 5.7m/s). The material removal rate was increased with polishing speed and pressure. Higher polishing temperature would improve the chemical reaction and result in better surface finish.



Edited by:

Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki




W. C. Chou et al., "Investigation of Thermo-Chemical Polishing of CVD Diamond Film", Key Engineering Materials, Vol. 329, pp. 195-200, 2007

Online since:

January 2007




[1] Senbo, Takashi 2000 SAW Filter Improve To Keep Up With Small, Dual-System Mobil Phones, AEI May, pp.28-30, (2000).

[2] Nishizawa, Toshio 2000 Fujitsu Media Carves Out New Boundaries in SAW Filter Techniques, AEI July, pp.36-40.

[3] Higaki K. 1997 High Frequency Saw Filter on Diamond, IEEE MTT-S Digest, pp.829-832, (1997).

[4] Kadota, M. and Kitamura, T. 1999 Influence of Leaky Surface Acoustic Wave Velocity of Glass Substrates on Frequency Variation of ZnO/Glass SAW Filters, IEEE Transaction on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 46, pp.817-822.


[5] Tokura, H. and Yoshikawa, M. 1991 Applications of Diamond Films and Related Materials, Elsevier, Amsterdam, p.227.

[6] Bhushan, B.; Subramaniam, V.V.; Malshe, A.; Gupta, B.K. and Ruan, J. 1993 J. of Appl. Phys., Vol. 74, No. 6, p.4174.

[7] Spear, K.E. & Dismukes, J.P. 1993, Synthetic Diamond-Emerging CVD Science and Tech., Wiley, NY.

[8] Yoshikawa, M. 1990 Diamond Optics III, SPIE 1325, p.210.

[9] Yoshikawa, M. and Okuzumi, F. 1996, Surface & Coatings Technology, Vo. 88, p.197.

[10] Jin, S. and Graebner, T.H. et al 1992 Diamond and Related Materials Vol. 1, p.949.

[11] Jin, S. 1992 Appl. Phys. Lett. Vol. 60(16), p.36.

[12] Jin, S.; Zhu, W. and Graebner, T.E. 1995 Appl. Of Diamond Films and Related Mat. (Ed. Feldman, A. et al), NIST-SP-885, p.209.

[13] Ramesham, R. and Rose, M.F. 1998 Thin Solid Film, Vol. 320, p.223.

[14] Nishimura, K.; Ohmori, H.; Lin W.; Makinouchi, A.; Ibuki, S.; Kono, T. and Takechi, O. 2000 J. of (Japan) Society of Grinding, Vol. 44, No. 8, p.383.

[15] Tezuka, S. and Yoshikawa, M. 1990, New Diamond, Vol. 17, p.36.

[16] Tokarev, V.N.; Wilson, J.I.B.; Jubber, M.G.; John, P. and Milne, D.K. 1995 Diamond and Related Materials, No. 4, p.169.

[17] Chien, T.; Cutshaw, C.; Tanger, C. and Tzeng, Y. 1995 Appl. Of Diamond Films and Related Mat. (Ed. Feldman, A. et al), NIST-SP-885, p.257.

[18] Cappelli, E.; Mattei, G.; Orlando, S.; Pinzari, F. and Ascarelli, P. 1999 Diamond and Related Materials, No. 8, p.257.


[19] Ral'chenko, V.G.; Korotushenko, K.G.; Smolin, A.A. and Loubnin, E.N. 1995 Diamond and Related Materials, No. 4, p.893.

[20] Shafeev, G.A.; Obraztsova, E.D. and Pimenov, S, M, 1997 Materials Science and Engineerig B, Vol. B46, p.129.

[21] Funamoto, H and Koseki, O., 1991 Surface Coating Tech., Vol. 47 p.474.

[22] Vivensang, C.; Ferlazzo-Manin, L.; Ravet, M.F.; Turban, G.; Rousseaux, F. and Gicquel, A. 1996 Diamond Related Mater. No. 5, p.840.


[23] Sandu, G.S. and Chu, W.K. 1989 Appl. Physics Letters, Vol. 55, p.437.

[24] Paul, E.; Evans, C.J.; Mangamelli, A.; McGlauflin, M.L. and Polvani, R.S. 1996 Precision Engineering, Vol. 18, p.4.

[25] Malshe, A.P.; Park, B.S.; Brown, W.D. and Naseem, H.A. 1999 Diamond and Related Materials, No. 8, p.1198.