Experimental Research on Ultra-Smooth Surface Polishing Based on Two-Dimensional Vibration of Liquid
Experiment research of polishing based on liquid two-dimension vibration is carried out by a vibrating device which is driven by ultrasonic source and can produce coupling vibrations of liquid. Sound pressures of some key points in water are tested by hydrophone and translated into sound intensity to evaluate the effect of input voltage of transducer. It is analyzed which vibration state of fluid field and the way that workpiece is clamped is the best for the polishing. Polishing results of quartz glass are evaluated by the use of region-track measure method, and some polishing rules are presented.
Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki
Z. N. Guo et al., "Experimental Research on Ultra-Smooth Surface Polishing Based on Two-Dimensional Vibration of Liquid", Key Engineering Materials, Vol. 329, pp. 219-224, 2007