High accuracy and high efficiency machining of micro parts such as a contact probe for a current inspection of semiconductor is increasingly demanded. In this study, we have focused on a micro cutting technology of a carbon tool steel which is a typical material for a contact probe. In order to put the precision cutting of the high strength material into practice, it is essential to understand the micro cutting phenomenon such as the surface texture, the tool wear with small depth of cut and low cutting speed. Then, the precision cutting experiments of a carbon tool steel (SK105) by titanium carbide and ultra-fine grained tungsten carbide tools were carried out with an ultra-precision cutting machine. It was found that the feed rate, the cutting speed and the edge sharpness of tool significantly influence the surface finish.