Development of a Silicon Based Air-Breathing Micro Direct Methanol Fuel Cell


Article Preview

As one part of the efforts to break the bottleneck of power sources in development of integrated micro systems, a silicon based air-breathing micro direct methanol fuel cell (μDMFC) was developed in this work. By using micro-machining technologies compatible with that in processing of the other MEMS devices, the anode and cathode micro flow-field plates had been successfully fabricated on a pair of 2-inch silicon wafers. The silicon μDMFC was evaluated under ambient conditions using aqueous methanol solution with different concentrations. Results show that open circuit potential (OCP) of the μDMFC was above to 0.6 V, and by using 3mol/L methanol, the peak current density and power density of the silicon μDMFC could reach 28mA/cm2 and 8mW/cm2, respectively.



Edited by:

Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki






L. D. Wang et al., "Development of a Silicon Based Air-Breathing Micro Direct Methanol Fuel Cell", Key Engineering Materials, Vol. 329, pp. 607-612, 2007

Online since:

January 2007




[1] P. B. Koeneman, I. J. Busch-Vishniac, and K. L. Wood: J. Microelectromechnical Systems. Vol. 6 (1997), No. 4, pp.355-362.

[2] J. B. Lee, Z. Chen, M. G. Allen, A. Rohatgi, and R. Arya: J. Microelectromechnical Systems. Vol. 4 (1995), No. 3, pp.102-108.

[3] K. Wozniak, D. Johansson, and M. Bring: J. Micromech. Microeng. Vol. 14 (2004), pp. S59-S63.

[4] H. Guo, and A. Lal: Proc. 12th Int. Conf. Solid State Sensors, Actuators and Microsystems. (Boston, USA 2003), pp.36-39.

[5] J.S. Liang, C. Liu and J. Liu: Proc. 4th Int. Workshop on Microfactories. (Shanghai, China 2004), pp.176-181.

In order to see related information, you need to Login.