Preparation and Properties of PZT Bimorph on Metal Substrate by Hydrothermal Method
Piezoelectric bimorph fabricated by hydrothermal method is presented in the paper. This method is low cost, simple and easy. In order to describe the characteristics of piezoelectric bimorph, properties of PZT film are studied by XRD and SEM. The ratio of PbTiO3/PbZrO3 in PZT is 53/47, which is around morphotropic phase boundary (MPB). PZT film is composed of cubic particles with the average size of 5μm. Density is figured out through the datum measured in experiments. The model used to analyze the driving ability of bimorph is set up; piezoelectric coefficient d31 of PZT film is worked out using this model. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph Vc =1.67V is obtained.
Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki
L.Q. Du et al., "Preparation and Properties of PZT Bimorph on Metal Substrate by Hydrothermal Method", Key Engineering Materials, Vol. 329, pp. 619-624, 2007