Electrophoretic Deposition Ba0.65Sr0.35TiO3 Thick Films for Tunable Microwave Devices
Pure barium strontium titanate (Ba0.65Sr0.35TiO3) and MnO2-modified barium strontium titanate (Ba0.65Sr0.35TiO3-MnO2) thick films were fabricated by electrophoretic deposition technique. The structures and morphologies of the films were analyzed. The dielectric measurements were conducted on metal-insulator-metal capacitors using platinum as the bottom electrodes and gold as the top electrodes. The dielectric constants and dissipation factors of Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-15wt% MnO2 thick films were measured at a frequency of 1 MHz. The tunabilities of 12.5% and 9.3% were obtained for Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-MnO2 thick films under an applied electric field of 15 kV/cm, respectively. The dielectric properties of the present thick films were suitable for tunable microwave device applications.
Wei Pan and Jianghong Gong
H. Xue et al., "Electrophoretic Deposition Ba0.65Sr0.35TiO3 Thick Films for Tunable Microwave Devices", Key Engineering Materials, Vols. 336-338, pp. 111-113, 2007