Preparation of ZnSe by CVD with the Solid Starting Materials
In this paper, particular CVD processes of so-called Se method with solid substances as starting materials was investigated to fabricate ZnSe. On the basis of detailed experimental researches, the growth model and dominant regime of deposition rate were discussed. ZnSe of high optical properties was produced under optimized process conditions. The grain size of CVD ZnSe by Se method is less than 10μm, and its average transmittance in the wavelength range of 0.55~20μm is up to 70%.
Wei Pan and Jianghong Gong
Z. Y. Fang, W. Pan, H. F. Zhu, L. Q. Zhang, M. H. Fang, "Preparation of ZnSe by CVD with the Solid Starting Materials", Key Engineering Materials, Vols. 336-338, pp. 1225-1228, 2007