Sintering AlN Ceramics Below 1500°C with MgO-CaO-Al2O3-SiO2 Glass Addition
5~15 wt% MgO-CaO-Al2O3-SiO2 (MCAS, fabricated by sol-gel method) glass is used as the sintering aid of AlN ceramics. The sintering is proceeded from 1350oC~1550oC, scanning electron microscope is used to observe the sintered morphologies and X-ray diffraction pattern are used to confirm the crystal structures. From the SEM observations, as 10wt% and 15wt% MCAS is added, AlN ceramics can be densified at 1500oC and 1450oC, which are much lower than the before studies were. From the X-ray diffraction patterns, the crystal phases of MCAS-AlN ceramics are AlN, Al2O3, and cordierite phases. In this study, the dielectric characteristics of MCAS-AlN ceramics are also developed as a function of MCAS content and sintering temperature.
Wei Pan and Jianghong Gong
C. F. Yang et al., "Sintering AlN Ceramics Below 1500°C with MgO-CaO-Al2O3-SiO2 Glass Addition", Key Engineering Materials, Vols. 336-338, pp. 1868-1871, 2007