Resonant Modes of Piezoelectric Disc Structure and their Application in Micro Ultrasonic Motors
This article describes out-of-plane resonant modes of a piezoelectric disc structure. A new type of micro ultrasonic motor using the resonant mode B11 (Bmn, where m is the number of nodal circles, n is the number of nodal diameters) has been studied. The motor is a wobble-type motor. The stator of the motor uses this structure, consisting of a hollow metal cylinder and a piezoelectric ceramic disc bonded with a metal one, which is excited in the vibration mode by two electrical signals. The stator exhibits wobble displacement and transfers rotation to a rod rotor by the cylinder. The behavior of the stator has been simulated by the finite element analysis. The simulation results have been checked with laser scanning by a laser scanning vibrometer. The article closes with the introduction of the new micro ultrasonic motors based on this vibration mode with high rotation speed.
Wei Pan and Jianghong Gong
L. Ma, X. C. Chu, L. T. Li, S. M. Yuan, "Resonant Modes of Piezoelectric Disc Structure and their Application in Micro Ultrasonic Motors", Key Engineering Materials, Vols. 336-338, pp. 345-347, 2007