Experimental Study on the Surface Modification and Materials Removal of Ultra Thin DLC Films


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Thin DLC film is in need for higher magnetic storage density. Surface modification and materials removal of DLC films were carried out in order to estimate the reliability of the ultra thin DLC films. Atomic force microscope (AFM) was used to investigate the wear resistance, surface modification and mechanical reliability of the films. Wear test by contact AFM indicated that wear depth under the same load was varied at different thick films. The local modification is studied using conductive atomic force microscope (C-AFM). Especially, topography change is observed when DC bias voltage applied. Experimental results show that the DLC surface is not modified after direct current applied on the tip. While positive voltage is applied on the DLC film surface, the nanoscale pit on the surface is formed clearly. According to the interaction force between CoCr coating MESP tip and the DLC film surface, as well as the Sondheimer oscillation theory, the “scale wing effect” of the pit is explained. Electromechanical coupling on the DLC film indicates that the depth of pit increases with the augment of force applied on surface when normal force is less than a certain threshold pressure.



Edited by:

Shen Dong and Yingxue Yao




Z. Fan et al., "Experimental Study on the Surface Modification and Materials Removal of Ultra Thin DLC Films", Key Engineering Materials, Vol. 339, pp. 211-216, 2007

Online since:

May 2007




[1] E. Betzig and J. K. Tautman: Appl. Phys. Lett., Vol. 61 (1992), p.142.

[2] R. Nyffenegger and R. Penner: Chem. Rev., Vol. 97 (1991), p.1195.

[3] A. Alison: Advanced Semiconductor and Organic Nano-techniques (Academic Press, Netherland 2002).

[4] J. Robertson: Mat. Sci. Eng. R., Vol. 37 (2002), p.129.

[5] J. Cleveland and S. Manne: Rev. Sci. Instrum., Vol. 64 (1993), p.403.

[6] M. Levinshtein and S. Rumyantsev: Handbook Series on Semiconductor Parameters (World Scientific, London 1996).

[7] C. Martino, F. Demichelis and A. Tagliaferro: Diamond and Related Materials, Vol. 3 (1994), p.547.

[8] P. Avouris, R. Martel and T. Hertel: Appl. Phys. A, Vol. 66 (1998), pp. S659.

[9] P. Avouris, T. Hertel and R. Martel: Appl. Phys. Lett., Vol. 71 (1997), p.285.

[10] M. R. Kobliscbkal, B. Hewenerl and B. Hewener: Appl. Phys. A., Vol. 76 (2003), p.879.

[11] M. Weiler, S. Sattel, K. Jung and H. Ehrhardt: Appl. Phys. Lett., Vol. 64 (1994), p.2797.

[12] E. Luo, S. Lin and Z. Xie: Mater. Charact., Vol. 48 (2002), p.205.