Nanometer Positioning in the Presence of Friction

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This paper deals with nanometer positioning in the presence of friction. The object studied is a ball-screw-driven and linear-ball-guide-supported table system. For this system, the friction dominates the resulting performance for micro-motion and the system exhibits microdynamic characteristic which is rather different from macrodynamics. Inherently a controller with high loop-gain is needed to suppress the effect of friction. A PID controller is designed for the table system for step height smaller than 10μm. Experiment and simulation results indicate that the PID controller can provide a sufficiently high-loop gain and effect of friction is suppressed. In point-to-point(PTP) positioning for step heights from 10μm down to 10nm, the positioning error is within ±2 nm and the response dynamics is satisfactory.

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Periodical:

Edited by:

Shen Dong and Yingxue Yao

Pages:

217-222

Citation:

L. H. Lu et al., "Nanometer Positioning in the Presence of Friction", Key Engineering Materials, Vol. 339, pp. 217-222, 2007

Online since:

May 2007

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$38.00

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