A new Micro-WEDM machine is developed in this paper. Therefore, experiment can be done on this machine. Especially, the surface characteristics of work-pieces are analyzed in detail. The Micro-WEDM can machine micro slot easily. In addition, all kinds of micro shaped holes, micro gears, complex micro parts and dies are machined to check its processability. A micro gear can be easily fabricated by micro-forming method with the micro gear dies fabricated by micro-WEDM, and get well performance, which indicates that micro parts machined by Micro-WEDM meet the requirements of micro instrument and device.