Replication for Microstructure Using Soft Mold


Article Preview

In this paper, a new replication technique for 1D, 2D, and 3D microstructure was introduced, in which a master pattern was made of photo-curable epoxy using microstereolithography technology, an etching process, and a dicing process. Next, it was transferred onto an epoxy. Barrier ribs were selected as the 1D microstructure, and a rectangular pattern was selected as the 2D microstructure. A helical gear was selected as one of the real 3D microstructures for this study, and these were replicated from pure epoxy. In addition, the life span of the soft mold for using the micro replication process was evaluated.



Edited by:

Shen Dong and Yingxue Yao




S.J. Park et al., "Replication for Microstructure Using Soft Mold", Key Engineering Materials, Vol. 339, pp. 348-354, 2007

Online since:

May 2007




[1] J.M. Bustillo, R.T. Howe and R.S. Muller: Proceedings of the IEEE, Vol. 86 (1998) No. 8, pp.1552-1574.

[2] J. Zhang, K.L. Tan and H.Q. Gong: Polymer test 20, (2001), pp.693-701.

[3] C.R. Friedrich, P.J. Coane and M.J. Vasile: Microelectronic Engineering, Vol. 35 (1997) No. 1-4, pp.367-372.

[4] D.G. Lee, H.G. Lee, P.J. Kim and K.G. Bang: International Journal of Machine Tools and Manufacture, Vol. 43 (2003) No. 6, pp.551-558.

[5] B.H. Yan, A.C. Wang, C.Y. Huang and F.Y. Huang: International journal of machine tools and manufacture, Vol. 42 (2002) No. 10, pp.1105-1112.

[6] M. Farsari, F. Claret-Tournier, S. Huang, C. R. D. Chatwin, M. Budgett, P. M. Birch, R. C. D. Young and J. D. Richardson: Journal of Materials Processing Technology, Vol. 107 (2000) No. 1-3, pp.167-172.

DOI: 10.1016/s0924-0136(00)00672-5

[7] K. Ikuta and K. Hirowatari: Proc. of IEEE international workshop on MEMS' 93, (1993), pp.42-47.

[8] C.M. Chan: Hanser Publishers, New York (1994), pp.39-44.

Fetching data from Crossref.
This may take some time to load.