Method of Microelectrode with Electrochemical Machining and its Applications
According to the present situation of microelectrode machining, the fabrication technology of microelectrode is put forward by the method of high frequency short pulses in electrochemical machining (ECM). The mechanism of pulses ECM is depicted firstly. Then the system of ECM is designed. After the experiment of technology analyzed, a microelectrode with nice surface is machined successfully. The diameter of the microelectrode is 7μm and the radius of its top is 50nm, which is made of tungsten filament. It could provide the simple electrode for further electrical machining or micro probe for scanning probe microscopy. The surface property, structure, and microhardness of the microelectrode are analyzed. The surface property and the machining capability of the microelectrode are compared with the microelectrode machined by electrical discharge machining (EDM). The superiority of the microelectrode machined by ECM is shown fully. The practicability and reliability are proved by the research of experimentations.
Shen Dong and Yingxue Yao
Z. L. Wang and B. G. Zhu, "Method of Microelectrode with Electrochemical Machining and its Applications", Key Engineering Materials, Vol. 339, pp. 360-364, 2007