A Framework of a Model-Based Simulation System for Prediction of Surface Generation in Fast Tool Servo Machining of Optical Microstructures
The fabrication of high-quality optical microstructural surfaces is based on fast tool servo (FTS) machining. It makes use of auxiliary piezo-electric driven servos to rapidly actuate the diamond tool with a fine resolution and a sufficiently high bandwidth for machining optical microstructures with submicrometer form accuracy and a nanometric surface finish without the need for any subsequent post processing. However, the achievement of a superior mirror finish and form accuracy still depends largely on the experience and skills of the machine operators, acquired through an expensive trial-and-error approach to using new materials, new mircostructural surface designs, or new machine tools. As a result, this paper, a model-based simulation system is presented for the optimization of surface quality in the FTS machining of optical microstructures. Preliminary experimental work and the results are also presented.
Shen Dong and Yingxue Yao
C. F. Cheung et al., "A Framework of a Model-Based Simulation System for Prediction of Surface Generation in Fast Tool Servo Machining of Optical Microstructures", Key Engineering Materials, Vol. 339, pp. 407-411, 2007