In this study, Nano Infiltration Transient Eutectic Phase SiC ceramics (NITE-SiC) was fabricated by hot press method with nano-SiC powder which a particle size is about 30nm, and alumina, yttria and silica were used for sintering additives. Process condition of NITE-SiC was given temperature of 1800oC, pressure of 20Mpa and holding time of 1Hr. NITE-SiC was optimization for densification and good mechanical properties by preceding researches. As a result, weight loss was occurred heat treatment temperature of all. Surface of heat treated specimens was occurred reacting of oxidation or erosion. All Point was occurred residual stress, but residual Stress was show Relaxant properties by effect of heat treatment.