A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication
Design of design of X-Y-Theta fine stage using VCM (voice coil motor) is presented in this paper. This fine stage is combined with linear DC motor. Long range, high speed and high precision of the stage is obtained by using dual servo control for laser micro/nano machining. A novel structure of VCM for the fine stage is proposed. The fine stage can have 3 DOF(X-Y-Theta) motion by four VCM actuators which are located on the same plane. The X-Y-Theta fine stage is designed to have high acceleration for high throughput. Based on the design, the stage is fabricated. The designed stage has the acceleration of 5m/s2 with 45kg total mass. In addition, this actuator is feedback controlled using HP laser interferometer. The reaction force between the coarse and fine stage of the dual servo is compensated by force compensator.
S.W. Nam, Y.W. Chang, S.B. Lee and N.J. Kim
K. H. Kim et al., "A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication ", Key Engineering Materials, Vols. 345-346, pp. 757-760, 2007