A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication

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Design of design of X-Y-Theta fine stage using VCM (voice coil motor) is presented in this paper. This fine stage is combined with linear DC motor. Long range, high speed and high precision of the stage is obtained by using dual servo control for laser micro/nano machining. A novel structure of VCM for the fine stage is proposed. The fine stage can have 3 DOF(X-Y-Theta) motion by four VCM actuators which are located on the same plane. The X-Y-Theta fine stage is designed to have high acceleration for high throughput. Based on the design, the stage is fabricated. The designed stage has the acceleration of 5m/s2 with 45kg total mass. In addition, this actuator is feedback controlled using HP laser interferometer. The reaction force between the coarse and fine stage of the dual servo is compensated by force compensator.

Info:

Periodical:

Key Engineering Materials (Volumes 345-346)

Edited by:

S.W. Nam, Y.W. Chang, S.B. Lee and N.J. Kim

Pages:

757-760

Citation:

K. H. Kim et al., "A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication ", Key Engineering Materials, Vols. 345-346, pp. 757-760, 2007

Online since:

August 2007

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Price:

$38.00

[1] Malcolm Gower: Proceedings of SPIE Vol. 4559 (2001) pp.53-59.

[2] Information on http: /www. charment. net.

[3] Duane C. Hanselman in: Brushless Permanent-Manget Motor Design, McGraw-Hill, New York (1994). 5nm 00. 0. 05 arcsec 25 mm/s.

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