Fatigue Crack Growth Experiments of Resonating Micro-Samples

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The reliability and optimal design of Micro Electro Mechanical Systems (MEMS) can be achieved only with the determination of material properties at the micro-scale. The major challenges in performing fatigue tests at the micro-scale are related to the accurate measurement of tiny deformations, to the control of very low forces and to the preparation, handling and positioning of μm-sized samples. In order to investigate the fatigue behaviour of MEMS components a new experimental setup based on the Phase Lock Loop (PLL) technique and a continuum mechanical model were developed for the characterization of micro-sized test samples. The main advantage of PLL is the achievable resolution in the crack length measurement, which increases with the decreasing of specimen size. Therefore, micro-beams with notches and without notches were prepared by electroplating Nickel in a SU8 photoresist mold (UV-LIGA). Investigations on the initiation and near-threshold crack growth behavior were performed to improve the understanding of the micro-mechanisms involved in fatigue phenomena.

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Periodical:

Key Engineering Materials (Volumes 345-346)

Edited by:

S.W. Nam, Y.W. Chang, S.B. Lee and N.J. Kim

Pages:

817-820

Citation:

A. Cambruzzi and J. Dual, "Fatigue Crack Growth Experiments of Resonating Micro-Samples", Key Engineering Materials, Vols. 345-346, pp. 817-820, 2007

Online since:

August 2007

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$38.00

[1] Connolley T., Mchugh P.E., Bruzzi M., A review of deformation and fatigue of metals at small scales, Fatigue and Fract. Engng Mater Struct 28, 1119-1152 (2005).

DOI: https://doi.org/10.1111/j.1460-2695.2005.00951.x

[2] Gudmundson P., The dynamic Behaviour of Slender Structureswith Cross-Sectional Cracks, J. Mech. Phys. solids. 31 (4), 329-345 (1983).

DOI: https://doi.org/10.1016/0022-5096(83)90003-0

[3] Schlums D.H., Dual J. High resolution crack growth measurements in vibrating beams, Fatigue and Fracture of Engineering Materials and Structures (UK). Vol. 20, no. 7, 1051-1058. (1997).

DOI: https://doi.org/10.1111/j.1460-2695.1997.tb01547.x

[4] Hemker K.J., Last H. , Microsample tensile testing of LIGA nickel for MEMS applications, Materials Science and Engineering, A319-321, 882-886 (2001).

DOI: https://doi.org/10.1016/s0921-5093(01)00956-x

[5] Mazza E., Abel S., Dual J., Experimental determination of mechanical properties of Ni and Ni-Fe microbars, Micros. Technol. 2, 197-202 (1996).

DOI: https://doi.org/10.1007/s005420050044

[6] Dongil Son, Jong-jin Kim, Ju-Young Kim, Dongil Kwon, Tensile properties and fatigue crack growth in LIGA nickel MEMS structures, Materials Science and Engineering A, 406, pp.274-278 (2005).

DOI: https://doi.org/10.1016/j.msea.2005.06.044

[7] Hadrboletz A., Weiss B., Katibi G., Fatigue and fracture properties on thin metallic foils, International Journal of Fracture, Volume 109, pp.69-89 (2001).

[8] McEvily A.J., Fatigue crack threshold, ASM handbook vol. 19, Steven R. Lampman ed., Materials Park, OH (1996). Fig. 4: Fracture surface of a LIGA Ni.

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