Thermodynamic Analysis of EB-PVD Preparing SiC Coating
The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating by Electron Beam evaporating 3C-SiC ingot on stainless steel (SS) substrate was firstly discussed as a preliminary estimation from thermodynamic viewpoint. The results show that, with the temperature increasing from 2500 to 3400 K, the purity of SiC coating increases from 0.58 to 0.734.
Yu Zhou, Shan-Tung Tu and Xishan Xie
X. D. He et al., "Thermodynamic Analysis of EB-PVD Preparing SiC Coating", Key Engineering Materials, Vols. 353-358, pp. 1663-1666, 2007