Thermodynamic Analysis of EB-PVD Preparing SiC Coating

Abstract:

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The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating by Electron Beam evaporating 3C-SiC ingot on stainless steel (SS) substrate was firstly discussed as a preliminary estimation from thermodynamic viewpoint. The results show that, with the temperature increasing from 2500 to 3400 K, the purity of SiC coating increases from 0.58 to 0.734.

Info:

Periodical:

Key Engineering Materials (Volumes 353-358)

Edited by:

Yu Zhou, Shan-Tung Tu and Xishan Xie

Pages:

1663-1666

DOI:

10.4028/www.scientific.net/KEM.353-358.1663

Citation:

X. D. He et al., "Thermodynamic Analysis of EB-PVD Preparing SiC Coating", Key Engineering Materials, Vols. 353-358, pp. 1663-1666, 2007

Online since:

September 2007

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Price:

$35.00

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