Thermodynamic Analysis of EB-PVD Preparing SiC Coating


Article Preview

The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating by Electron Beam evaporating 3C-SiC ingot on stainless steel (SS) substrate was firstly discussed as a preliminary estimation from thermodynamic viewpoint. The results show that, with the temperature increasing from 2500 to 3400 K, the purity of SiC coating increases from 0.58 to 0.734.



Key Engineering Materials (Volumes 353-358)

Edited by:

Yu Zhou, Shan-Tung Tu and Xishan Xie




X. D. He et al., "Thermodynamic Analysis of EB-PVD Preparing SiC Coating", Key Engineering Materials, Vols. 353-358, pp. 1663-1666, 2007

Online since:

September 2007




[1] C. Bartuli, T. Valente and M. Tului: Surf. Coat. Technol. Vol. 155 (2002), p.260.

[2] S.K. Gong, H.B. Xu, Q.H. Yu and C.G. Zhou: Surf. Coat. Technol. Vol. 130 (2000), p.128.

[3] B.A. Movchen: JOM. Vol. 46 (1996), p.40.

[4] B.A. Movchan: Surf. Eng. Vol. 1 (2006), p.35.

[5] Information on http: /webbook. nist. gov.

Fetching data from Crossref.
This may take some time to load.