The crystal orientation, surface morphology, surface roughness and scratch properties of Au/NiCr/Ta multi-layered metallic films was examined by X-ray diffraction (XRD), atomic force microscopy (AFM) and a scratch test method, respectively. It was clarified that the surface morphology and surface roughness depend on the substrate temperature. The surface roughness decreases from 4.259nm to 2.935nm when substrate temperature changed from 100°C to 180°C, and then increases when substrate temperature above 180°C. The XRD revealed that there are only Au diffraction peaks with highly textured having a Au-(111) or a mixture of Au-(111) and Au-(200) orientation. The micro-scratch test reveals that both modes can be used for conventionally critical load determination, but the friction mode can additionally reflect the changes at different metallic film layers, the critical characteristic load was not sensitive to substrate temperature.