Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Two-Beam Holographic Method Using Nanosecond Laser Pulses


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A new method of etching micro-grating structures (MGSs) on the surface of glazed stainless-steel directly is reported, which makes good use of the interference of nanosecond laser pulses. Through changing the experimental parameters such as working current of the laser and source beam diameter, the influences of these parameters on the depth of grooves and duty cycle of MGSs are analyzed. The results measured with conventional optical microscopy and atomic force microscopy (AFM) show that the depth of grooves of MGSs varies from 0 nm to 350 nm, the duty cycle of MGSs changes between 0.4 and 0.9, This method can be used to make a stencil-plate for nano-imprinting. It extends the application of nanosecond laser in laser-induced microstructures, and provides a new method for micromachining micro-optical component.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO






H. Zhang et al., "Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Two-Beam Holographic Method Using Nanosecond Laser Pulses ", Key Engineering Materials, Vols. 364-366, pp. 1133-1137, 2008

Online since:

December 2007




[1] K. Naessens, Heidi Ottevaere et al: Flexible fabrication of microlenses in polymer layers with excimer laser ablation. Applied Surface Science. Vol. 208-209(2003), p.159.

DOI: 10.1016/s0169-4332(02)01359-4

[2] Yan Li, Wataru Watanabe et al: Holographic fabrication of multiple layers of grating inside soda-lime glass with femtosecond laser pulses. Applied Physics Letters. Vol. 80(2002), p.1508.

DOI: 10.1063/1.1457524

[3] P. -F. Vhauvy, P. Hoffmann, D. Landolt: Applications of laser lithography on oxide film to titanium micromachining. Applied Surface Science. Vol. 208-209(2003), p.165.

DOI: 10.1016/s0169-4332(02)01361-2

[4] A. Bensaoula, C. Boney, R. Pillai et al: Arrays of 3D micro-columns generated by laser ablation of Ta and steel: modeling of a black body emitter. Applied Physics A. Vol. 79(2004), p.973.

DOI: 10.1007/s00339-004-2588-z

[5] Quan-zhao Zhao, Jian-rong Qiu et al: Fabrication of internal diffraction gratings in calcium fluoride crystals by a focused femtosecond laser. Optics Express. Vol. 12(2004), p.742.

DOI: 10.1364/opex.12.000742

[6] Nobuhito Takeshima, Yoshihiro Narita et al: Fabrication of high-efficiency diffraction gratings in glass. Optics Letters, Vol. 30(2005), p.352.

DOI: 10.1364/ol.30.000352

[7] K. Venkatakrishnan, N.R. Sivakumar, B. Tan: Fabrication of planar gratings by direct ablation using an ultrashort pulse laser in a common optical path configuration. Applied Physics. Vol. 76(2003), p.143.

DOI: 10.1007/s003390201418

[8] Masahiro Hirano, Ken-ichi Kawamura, Hideo Hosono: Encoding of holographic grating and periodic nano-structure by femtosecond laser pulse. Applied Surface Science. Vol. 197-198, p.688.

DOI: 10.1016/s0169-4332(02)00446-4

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