Analysis on Anti-Vibration Characteristic of Synchronism Phase-Shifting


Article Preview

Vibration is the biggest problem for precise on-line surface measurement. In order to investigate the possibility for phase-shifting interference technique to be applied to precise on-line surface measurement, a synchronic phase-shifting technique is proposed. Its anti-vibration characteristics are analyzed and a vibration table to simulate different vibration conditions is set up, on which many experiments for surface measurement under different vibration conditions are conducted. The analysis and experimental testing verify the excellent anti-vibration characteristics of the interferometer for on-line precise surface measurement.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




Y. M. Wang and X. J. Liu, "Analysis on Anti-Vibration Characteristic of Synchronism Phase-Shifting", Key Engineering Materials, Vols. 364-366, pp. 182-187, 2008

Online since:

December 2007




[1] Ichirou Yamaguchi, Jun-ichi Kato and Sohgo Ohta: Surface Shape Measurement by PhaseShifting Digital Holography. Optical Review. Vol 8(2001), No 2, pp.85-89.

DOI: 10.1007/s10043-001-0085-6

[2] P. Hariharan: Interferometric testing of optical surfaces: Absolute measurements of flatness, Opt. Eng. Vol. 36 (1997), No. 9, pp.2478-2481.

DOI: 10.1117/1.601474

[3] Liu X J and Gao Y S: Anti-vibration characteristics of a lateral shear interferometer for onmachine surface measurement. Laser Technology. Vol 30, No 4(2006), pp.337-343.

[4] N.R. Sivakumaran b and K. Venkatakrishnan: Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry. Optics Communications. Vol 257 (2006), pp.217-224.

DOI: 10.1016/j.optcom.2005.07.056

[5] V. A. Vasilev, V. A. Zhmud and Yu. N. Iyanovich: Detection of the Increment of an Instantaneous Phase in a Long-Base Laser Meter of Small Vibrations. Instruments and Experimental Techniques. Vol 45 (2002), pp.26-529.

[6] Zong W J, Li D: Machine Vibration Influence on Lapping Quality of Ultra-precision Diamond Cutting Tools. ACTA AERONAUTICA ET ASTRONAUTICA SINICA. Vol 26 (2005), No 367-370.

[7] M. Francon, S. Mallick: Polarization interferometers [M]. New York: Cwiley Interscience, (1971).

[8] Su D T: Optical testing technology (Beijing Institute of Technology Publications, Beijing 1996).

Fetching data from Crossref.
This may take some time to load.