Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand
MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
M. Nagao et al., "Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand", Key Engineering Materials, Vols. 364-366, pp. 30-34, 2008