Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand

Abstract:

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MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO

Pages:

30-34

DOI:

10.4028/www.scientific.net/KEM.364-366.30

Citation:

M. Nagao et al., "Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand", Key Engineering Materials, Vols. 364-366, pp. 30-34, 2008

Online since:

December 2007

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Price:

$35.00

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