A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface


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A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and evaluate the measured profile. Because of the specialty of SWLMI, the profilometer is suitable for both smooth and rough surface measuring. It also can be used for the measurement of curved surface, dimension of MEMS etc. The vertical resolution of the profilometer is 0.5nm, lateral resolution 0.5+m.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




R. Dai et al., "A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface", Key Engineering Materials, Vols. 364-366, pp. 364-370, 2008

Online since:

December 2007




[1] B.S. Lee, T.C. Strand: Appl. Opt. Vol. 29(1990), p.3784.

[2] P. J. Caber, S. J. Martinek, R. J. Niemann: SPIE Vol. 208(1993), p.195.

[3] S. K. Gordon, S.C.C. Stanley: Appl. Opt. Vol. 29(1990), p.3775.

[4] P. Pavel , S. Jan: Appl. Opt. Vol. 42(2003), p.1809.

[5] Information on http: /www. veeco. com. cn.

[6] P. de Groot,D., X. C. de Leslie, K. Jim, T. Michael: Appl. Opt. Vol. 41(2002), p.4571.

[7] K.G. Larkin: J. Opt. Soc. Am . A Vol. 13(1996), pp.832-843.

[8] G. Stoilov , T. Dragostinov: Optics and Lasers in Engineering Vol. 28(1997), p.61.

[9] Q.X. Li, D.S. Wang, Y.H. Li: Modern precision mechanism design(Qinghua University Publications, P.R. China, 2004).

[10] R. Dai, T.B. Xie, S.P. Chang: J. Phys., Conf. Ser. Vol. 13(2005), p.94.

[11] J.Q. Chen: Material mechanics(Huazhong University of Science and Technology Publications, P.R. China, 2001).

[12] X.Q. Jiang S.J. Xiao, T.B. Xie, Z. Li: Chinese Journal of Scientific Instrument Vol. 16 (1995), p.374.

[13] Q.G. Mao: The measurement and evaluation of surface roughness(Machine Press, P.R. China, 1991).