A Contact Stylus Profilometer Based on Linnik Interference Microscope


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We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




J. P. Yun et al., "A Contact Stylus Profilometer Based on Linnik Interference Microscope", Key Engineering Materials, Vols. 364-366, pp. 371-376, 2008

Online since:

December 2007




[1] Garrat,J. D., and Bottomley, S. C. Technology transfer in the development of a nanotopographic instrument. Nano-technology, 1, 38-43(1990).

[2] J. D. Garratt. Survey of displacement transducers bellow 50 mm. J. Phys. E, 12, 563-573(1979).

[3] X. Q. Jiang. Grating technology for topography measurement of curved surface. SPIE, 2101, 554-557 (1993).

[4] M. Gu. Advanced optical imaging theory (Springer-Verlog, Berlin, 2000).

[5] S. R. Clark, J. E. Greivenkamp. Ball tip-stylus tilt correction for a stylus profilometer. Precision Engineering, 26, 405-411 (2002).

DOI: 10.1016/s0141-6359(02)00118-6

[6] B. F. Alexander and K. C. Ng. Elimination of systematic error in subpixel accuracy centroid Estimation. Optical Engineering, 30, 1320-1330(1991).

DOI: 10.1117/12.55947

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