A Contact Stylus Profilometer Based on Linnik Interference Microscope
We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
J. P. Yun et al., "A Contact Stylus Profilometer Based on Linnik Interference Microscope", Key Engineering Materials, Vols. 364-366, pp. 371-376, 2008