A Contact Stylus Profilometer Based on Linnik Interference Microscope

Abstract:

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We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO

Pages:

371-376

Citation:

J. P. Yun et al., "A Contact Stylus Profilometer Based on Linnik Interference Microscope", Key Engineering Materials, Vols. 364-366, pp. 371-376, 2008

Online since:

December 2007

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$38.00

[1] Garrat,J. D., and Bottomley, S. C. Technology transfer in the development of a nanotopographic instrument. Nano-technology, 1, 38-43(1990).

[2] J. D. Garratt. Survey of displacement transducers bellow 50 mm. J. Phys. E, 12, 563-573(1979).

[3] X. Q. Jiang. Grating technology for topography measurement of curved surface. SPIE, 2101, 554-557 (1993).

[4] M. Gu. Advanced optical imaging theory (Springer-Verlog, Berlin, 2000).

[5] S. R. Clark, J. E. Greivenkamp. Ball tip-stylus tilt correction for a stylus profilometer. Precision Engineering, 26, 405-411 (2002).

DOI: https://doi.org/10.1016/s0141-6359(02)00118-6

[6] B. F. Alexander and K. C. Ng. Elimination of systematic error in subpixel accuracy centroid Estimation. Optical Engineering, 30, 1320-1330(1991).

DOI: https://doi.org/10.1117/12.55947

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