A Contact Stylus Profilometer Based on Linnik Interference Microscope

Abstract:

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We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO

Pages:

371-376

DOI:

10.4028/www.scientific.net/KEM.364-366.371

Citation:

J. P. Yun et al., "A Contact Stylus Profilometer Based on Linnik Interference Microscope", Key Engineering Materials, Vols. 364-366, pp. 371-376, 2008

Online since:

December 2007

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Price:

$35.00

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