Single-Point Diamond Turning of Aspheric Mirror with Inner Reflecting Surfaces


Article Preview

Grazing incidence optics used in soft X-ray microscopes require supersmooth surface and highly accurate figure. We considered the fabrication of a Wolter type I mirror, one of grazing incidence optics, with axial-symmetric inner reflecting surfaces using single-point diamond turning. Electroless nickel was chosen as reflecting material Cutting conditions for machining the inner reflecting surface were restricted because of long arm of a single-crystal diamond tool. The machined Wolter type I mirror had approximately 270 nm P-V in figure error and 3 nm Ra in surface roughness. The direct-machined Wolter type I mirror could be successfully used in a soft Xray microscope based on laser-produced X-ray source.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




K. S. Chon et al., "Single-Point Diamond Turning of Aspheric Mirror with Inner Reflecting Surfaces", Key Engineering Materials, Vols. 364-366, pp. 39-42, 2008

Online since:

December 2007




[1] R. Rhorer and C. Evans, in: OSA Handbook of Optics 2nd Ed Vol. 1, McGraw-Hill, Washington DC (1995).

[2] K.S. Chon, Y. Namba and K-H. Yoon: JSME International Journal Series C Vol. 49 (2006), p.56.

[3] M. Kühne and R. Thornagcl, in: X-ray microscopy III, edtied by A.G. Michette, G.R. Morrison and C.J. Buckley, Springer-Verlag, Berlin (2004).

[4] K.S. Chon, Y. Namba and K-H. Yoon: Precision Engineering Vol. 30 (2006), p.223.

[5] D.L. Hibbard: Proceeding of SPIE Vol. CR67 (1997), p.179.

[6] Z. Yean, W. Lee, Y. Yao and M. Zhou: Annals of the CIRP Vol. 43 (1994), p.39.

[7] J.K. Myler, R.A. Parker and A.B. Harrison: Proceeding of SPIE Vol. 1333 (1990), p.58.