3D Micro-Scale Profile Measuring System

Abstract:

Article Preview

An optical non-contact measurement system for micro-scale 3D profiles is developed and analyzed in this research. The core concept of the system is based on Shape-from-Focus method. The methodology and the process of the measurement will be explained in this paper. Briefly, corresponding digital images were taken at different heights with predefined step intervals. The properties of images were enhanced by image processing techniques including discrete Gaussian filtering, histogram equalization and high-boost filtering. Finally, the degree of the focused image was quantified by using Sum-Modified-Laplacian algorithm. The height of each pixel was determined with Gaussian Interpolation. 3D geometry model of the specimens can be reconstructed. This system was verified that it can work on the specimen manufactured by laser beam. Analysis of precision will be revealed and the comparison with other measurement methods will be discussed later.

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO

Pages:

394-399

Citation:

H. T. Young and W. Y. Lin, "3D Micro-Scale Profile Measuring System", Key Engineering Materials, Vols. 364-366, pp. 394-399, 2008

Online since:

December 2007

Export:

Price:

$38.00

[1] Shree K. Nayar and Yasuo Nakagawa, 1978, Shape from focus: An effective approach for rough surfaces, International Conference on Robotics and Automation, pp.218-225.

DOI: https://doi.org/10.1109/robot.1990.125976

[2] Ushir B . Shah and Shree K . Nayar, 1992, Extracting 3-D Structure and Focused Images Using an Optical Microscope, IEEE.

[3] Ng Kuang Chern, Nathaniel and Poo Aun Neow, Marcelo H. Ang Jr., Practical issues in pixelbased autofocusing for machine veision, Proceedings of the 2001 IEEE International Conference on Robotics & Automation Seoul, Korea, 2001, pp.21-26, (2001).

DOI: https://doi.org/10.1109/robot.2001.933045

[4] Gopal Surya, There Dimensional Scene From Image Defocus, The Graduate School in Partial fulfillment of the Requirements for the degree of Doctor of Philosophy in Electric of engineering State University of New York at Stony Brook, Dec (1994).

[5] P. Pentland, July 1987, A new sense for depth of field, IEEE Transactions on Pattern Analysis and Machine Intelligence, pp.523-531.

[6] K. J. Gasvik, 1995, Optical Metrology, 2nd Ed. John Wiley & Sons, pp.167-172.

[7] Malacara Daniel, 1992, Optical Shop Test, 2nd Ed. John Wiley & Sons, p.669.

[8] Cheng-Hsing Chang, Optical, non-contact, 3D image measurement development, master thesis, National Taiwan University, (2003).