Structural Design of a Bench-Type Ultra-Precision Machine Tool for Micro-Structured Optical Components
Micro-structured optical components (MOCs) show great promise for offering an exciting new degree of freedom and flexibility to optical designers and producers. At present, these micro/miniature components are usually manufactured by large ultra-precision machine tools in tightly controlled environment and the cost of machining is thus very high. In this study, a novel machine with compact structure and flexibility was built, specially used for machining of the MOCs. The key points of the design are given. Fresnel lens, as an example of MOCs, was machined by this machine tool, and the result shows that the form accuracy of the machine tool is in the order of sub-micrometer.
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Y. H. Yang et al., "Structural Design of a Bench-Type Ultra-Precision Machine Tool for Micro-Structured Optical Components", Key Engineering Materials, Vols. 364-366, pp. 408-412, 2008