Structural Design of a Bench-Type Ultra-Precision Machine Tool for Micro-Structured Optical Components


Article Preview

Micro-structured optical components (MOCs) show great promise for offering an exciting new degree of freedom and flexibility to optical designers and producers. At present, these micro/miniature components are usually manufactured by large ultra-precision machine tools in tightly controlled environment and the cost of machining is thus very high. In this study, a novel machine with compact structure and flexibility was built, specially used for machining of the MOCs. The key points of the design are given. Fresnel lens, as an example of MOCs, was machined by this machine tool, and the result shows that the form accuracy of the machine tool is in the order of sub-micrometer.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




Y. H. Yang et al., "Structural Design of a Bench-Type Ultra-Precision Machine Tool for Micro-Structured Optical Components", Key Engineering Materials, Vols. 364-366, pp. 408-412, 2008

Online since:

December 2007




[1] S. Kim, D. Kim, S. Kang: Jounal of Microlith., Microfab., Microsyst. Vol. 2 (2003), p.356.

[2] M. A. Davies, C. J. Evans, S. R. Patterson, R. Vohra, B. C. Bergner: Proc. of SPIE. Vol. 5183 (2003), p.94.

[3] Chris J. Evans, James B. Bryan: CIRP Annals. Vol. 48 (1999), p.541.

[4] P. Schellekens, N. Rosielle: CIRP Annals. Vol. 47 (1998), p.557.

[5] M. Weck, S. Fischer, and M. Vos: Nnanotechnology Vol. 8 (1997), p.145.

[6] Kiyoshi Sawada: CIRP Annals. Vol. 44 (1995), p.369.

[7] Xichun Luo, Kai Cheng, Dave Webb, Frank Wardle: Journal of Material Processing Technology Vol. 167 (2005), p.515.

[8] Zinan Lu, Takeshi Yoneyama: International Journal of Machine Tools & Manufacture Vol. 39 (1999), p.1171.