Method of Analyzing the Singlet F-Theta Scan Lens for Laser Drilling System


Article Preview

The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.



Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO




M. F. Chen et al., "Method of Analyzing the Singlet F-Theta Scan Lens for Laser Drilling System", Key Engineering Materials, Vols. 364-366, pp. 521-526, 2008

Online since:

December 2007




[1] W. M. Steen: Laser Material Processing (Springer-Verlag, London 1994).

[2] Breck Hitz, J.J. Ewing, Jeff Hecht: Introduction to Laser Technology (Institute of Electrical and Electronics Engineers, Inc., New York 2001).


[3] Jun Xie, Shuhuai Huang, Correction of the image distortion for laser galvanometric scanning system, Optical & Laser Technology, Vol. 37(2005), p.305.


[4] N. Sakuma, U.S. Patent 4, 571, 035. (1982).

[5] N. Sakuma, U.S. Patent 4, 695, 132. (1987).

[6] A. Morimoto, U.S. Patent 5, 134, 513. (1990).

[7] T. Araki, H. Imamura, K. Yoneoka, T. Kyotani, K. Yajima, F. Higuchi, H. Nanba, K. Fuse, K. Ebata and H. Iwamoto, Development of fθ Lens for CO2 Laser Drilling System, SEI Technical Review, Number 49, (2000).

[8] D. C. O'Shea: Elements of Modern Optical Design, (John Wiley & Sons, Inc., Canada 1985).

[9] R. E. Fischer: Optical System Design, (McGraw-Hill, United States of America 2000).

[10] Geary, J. M.: Introduction to Lens Design: With Practical ZEMAX Examples, (Willmann-Bell 1998).

[11] J.C. Ion: Laser Processing of Engineering Materials, (Elsevier Butterworth-Heinemann 2005).

[12] K. Fuse, T. Okada, H. Imamura Diffractive/Refractive Hybrid F-Theta Lens for Laser Drilling of Multilayer Printed Circuit Boards, Proceedings of SPIE, Vol. 4830 (2003).


[13] B. Tan, K. Venkatkrishnan, N.R. Sivakumar, G.K. Gan, Laser Drilling of Thick Material Using Femtosecond Pulse with a Focus of Dual-Frequency Beam, Optics & Laser Technology, Vol. 35 (2003), p.199.