Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification

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Periodical:

Key Engineering Materials (Volumes 364-366)

Edited by:

Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO

Pages:

555-559

DOI:

10.4028/www.scientific.net/KEM.364-366.555

Citation:

K. Hu et al., "Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification", Key Engineering Materials, Vols. 364-366, pp. 555-559, 2008

Online since:

December 2007

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$35.00

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