Method of Examining Surface Cracks on Monocrystalline Silicon
A new method on examining the micro cracks of monocrystalline silicon during nano indentation is proposed. It is established based on a study of the increasing rate of absorbed energy in nano indentation. This method provides a simple approach in understanding whether cracks on the silicon surfaces occur, while it is tedious in conventional method.
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
F. Z. Fang et al., "Method of Examining Surface Cracks on Monocrystalline Silicon", Key Engineering Materials, Vols. 364-366, pp. 920-924, 2008