XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel


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The chemical composition and the valence state of elements on the surface of ZrO2 thin films deposited on glass substrates have been studied by X-ray photoelectron spectroscopy. Results show that: elements of Na, Mg, Zr, Ca exist in the form of their respective stable state, such as Na2O, MgO, ZrO2, CaO, when heat treated at 500°C for 0.5h; but Si is unstable, and exhibit stoichiometrical disturbances. Results of chemical composition and their content by atom percent of ZrO2 thin films surface reveal that: Si, and Ca diffuse from glass to the thin films in scale; Na diffuses few and Mg collects to the thin films surface. The diffusion of Mg2+ and Ca2+ from glass to ZrO2 thin films is negative diffusion.



Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong




X. G. Yu et al., "XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel", Key Engineering Materials, Vols. 368-372, pp. 1277-1279, 2008

Online since:

February 2008




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