XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel
The chemical composition and the valence state of elements on the surface of ZrO2 thin films deposited on glass substrates have been studied by X-ray photoelectron spectroscopy. Results show that: elements of Na, Mg, Zr, Ca exist in the form of their respective stable state, such as Na2O, MgO, ZrO2, CaO, when heat treated at 500°C for 0.5h; but Si is unstable, and exhibit stoichiometrical disturbances. Results of chemical composition and their content by atom percent of ZrO2 thin films surface reveal that: Si, and Ca diffuse from glass to the thin films in scale; Na diffuses few and Mg collects to the thin films surface. The diffusion of Mg2+ and Ca2+ from glass to ZrO2 thin films is negative diffusion.
Wei Pan and Jianghong Gong
X. G. Yu et al., "XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel", Key Engineering Materials, Vols. 368-372, pp. 1277-1279, 2008