Accurate FEM/BEM Simulation of Wireless Passive Surface Acoustic Wave Sensors
The wireless passive surface acoustic wave (SAW) impedance-loaded sensors offer new and exciting perspectives for remote monitoring and controlling of moving parts, even in harsh environments. However, the classical simulation models such as equivalent circuit model (ECM) and coupling of modes (COM) model are not rigorous enough for these sensors since these sensors usually work in the RF band. We try to make it more accurate by using FEM/BEM (combined finite element method and boundary element method) model to determine some key parameters used in the COM model of impedance-loaded SAW sensors. In this paper, we use periodic Green function which is the basis of FEM/BEM model to determine the key parameters. The result of measurements on real SAW is nearly in accordance with that of simulations.
Wei Pan and Jianghong Gong
W. Luo et al., "Accurate FEM/BEM Simulation of Wireless Passive Surface Acoustic Wave Sensors", Key Engineering Materials, Vols. 368-372, pp. 198-201, 2008