A Novel Piezoelectric Micro-Motor Using Multilayer Co-Firing Piezoelectric Ceramics
A novel rotary piezoelectric micro-motor (φ8mm×10mm) is proposed in this paper. Different from the conventional traveling wave ultrasonic motor using piezoelectric ceramic ring, four multilayer co-firing piezoelectric ceramic bulks (2mm×2mm×3mm) are used to generate vibration in the ring type stator. The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the surface of the stator. The working mode of the prototype motor is simulated by the finite element method, and also measured by the Doppler Laser Vibrometer. The experimental results are in good agreement with simulation, which verifies the effectiveness of the finite element model. The prototype motor is driven at the low voltage of 12V under the frequency of 64.91 KHz.
Wei Pan and Jianghong Gong
Y. Ji et al., "A Novel Piezoelectric Micro-Motor Using Multilayer Co-Firing Piezoelectric Ceramics", Key Engineering Materials, Vols. 368-372, pp. 208-210, 2008