A Piezoelectric Micropump Based on MEMS Fabrication


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This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip. We employ a microelectromechanical system process for the silicon substrate and anodic bonding for assembly of the Pyrex glass and silicon wafer. The reciprocating type micropump contains two nozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator.



Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong




B. W. Wang et al., "A Piezoelectric Micropump Based on MEMS Fabrication", Key Engineering Materials, Vols. 368-372, pp. 215-217, 2008

Online since:

February 2008




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