A Piezoelectric Micropump Based on MEMS Fabrication
This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip. We employ a microelectromechanical system process for the silicon substrate and anodic bonding for assembly of the Pyrex glass and silicon wafer. The reciprocating type micropump contains two nozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator.
Wei Pan and Jianghong Gong
B. W. Wang et al., "A Piezoelectric Micropump Based on MEMS Fabrication", Key Engineering Materials, Vols. 368-372, pp. 215-217, 2008