Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator
A novel model of 3-DOF multilayer PZT micromanipulator is promoted and simulated with finite element analysis method. States under different applied voltages were discussed, including the motion along axis Z and the rotation along axis X and the bisector between X-Y. After analyzing the distribution of stress, we propose some method, which helps to improve the performance of the micromanipulator. We also do some quantificational analysis about the micromanipulator, discovering that the relationship between the displacements of the probe and applied voltages is almost perfectly linear. By comparing the constant D defining the relationship of the displacements of probe tip and applied voltages, the simulation is proved to be correct. Comparing the performance between the single-layer and multi-layer PZT, it shows that the multi-layer PZT can reduce input voltages, whereas can produce the same displacement. Ceramic sample is prepared for further experiment.
Wei Pan and Jianghong Gong
X. C. Chu et al., "Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator", Key Engineering Materials, Vols. 368-372, pp. 218-220, 2008