Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film


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A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/SiO2/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.



Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong




H. M. Liu et al., "Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film", Key Engineering Materials, Vols. 368-372, pp. 223-225, 2008

Online since:

February 2008




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