Microwave sintering behaviors of four different compositions of YSZ electrolyte materials were investigated. The samples were sintered in 2.45GHz microwave furnace. For comparison, conventional sintering was performed at 1821K.The densities of sintered samples showed considerable enhancement in the densification process under the influence of microwave fields. The samples with lower Y2O3 content are easy to sinter. The influence of the composition and sintering methods on the final phase composition and microstructure were investigated by X-ray diffraction and scanning electron microcopy. Finer and more uniform microstructures were observed in the microwave sintered samples comparing to the conventionally sintered samples.