Synthesis and Characterization of AZO Thin Films by Sol-Gel Process: The Influences of Precursors and Dopants

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Transparent ZnO and aluminum-doped zinc oxide (AZO) thin films were prepared via the sol-gel process on glass substrates using an alcoholic non-polyol route and spin-coater technique for film deposition. Zinc acetate, zinc chloride, and aluminum salt used as cations source. All the undoped and doped xerogel films were amorphous and converted into zincite structure after firing at 200 oC, irrespective of precursor types and dopant amounts. However, the evolution of morphology, microstructure, and texture of the gel films were strongly depended on the precursors and dopants. The films derived from zinc chloride showed strongly preferential (002) orientation, while acetate-derived films exhibited random orientation. On firing at 500 oC, the visible transmittances of films were 50~92%, depending on the kinds of precursors and dopant contents.

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Periodical:

Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong

Pages:

326-328

Citation:

M.T. Tsai et al., "Synthesis and Characterization of AZO Thin Films by Sol-Gel Process: The Influences of Precursors and Dopants", Key Engineering Materials, Vols. 368-372, pp. 326-328, 2008

Online since:

February 2008

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$38.00

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[10] [20] [30] [40] [50] [60] [70] [80] [90] 100 A2 A3 C1 C4 Transmittance (%) Wavelength (nm) Figure 4. Optical transmittance spectra of films A2, A3, C1 and C4 after heating at 500 o C. (thickness ~ 6000 ± 100 nm) 100 nm 100 nm 100 nm 100 nm.

DOI: https://doi.org/10.7554/elife.24001.007