Synthesis and Characterization of AZO Thin Films by Sol-Gel Process: The Influences of Precursors and Dopants
Transparent ZnO and aluminum-doped zinc oxide (AZO) thin films were prepared via the sol-gel process on glass substrates using an alcoholic non-polyol route and spin-coater technique for film deposition. Zinc acetate, zinc chloride, and aluminum salt used as cations source. All the undoped and doped xerogel films were amorphous and converted into zincite structure after firing at 200 oC, irrespective of precursor types and dopant amounts. However, the evolution of morphology, microstructure, and texture of the gel films were strongly depended on the precursors and dopants. The films derived from zinc chloride showed strongly preferential (002) orientation, while acetate-derived films exhibited random orientation. On firing at 500 oC, the visible transmittances of films were 50~92%, depending on the kinds of precursors and dopant contents.
Wei Pan and Jianghong Gong
M.T. Tsai et al., "Synthesis and Characterization of AZO Thin Films by Sol-Gel Process: The Influences of Precursors and Dopants", Key Engineering Materials, Vols. 368-372, pp. 326-328, 2008