Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc


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CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc technique (FCVA). The effect of different deposition parameters: nitrogen partial pressure, substrate-bias voltage and preheating of the substrate, on the structural and mechanical properties of the coating was investigated. X-ray diffraction analysis was used to determine the structure and composition of the coatings. The tribological behaviour and wear properties of the coatings against Si3N4 ball at different normal loads were studied under reciprocating sliding condition. The results showed that a smooth and dense CrN coating with good properties can be obtained provided a pure Cr interlayer was pre-deposited. The optimal deposition parameters were the nitrogen partial pressure of 0.1 Pa, substrate-bias voltage of -100 V. Preheating of the substrate was no good for improving the properties of the coating. The FCVA CrN coating showed high hardness and good wear resistance, which was probably attributed to its smooth surface and dense microstructure. The wear mechanism of the CrN coating was a combination of abrasion and oxidation. However, the coating flaked off at high normal load due to the deficient adhesion strength of the coating to the substrate.



Key Engineering Materials (Volumes 373-374)

Main Theme:

Edited by:

M.K. Lei, X.P. Zhu, K.W. Xu and B.S. Xu




J. L. Mo et al., "Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc", Key Engineering Materials, Vols. 373-374, pp. 130-133, 2008

Online since:

March 2008




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