Effect of Low-Energy Ion Irradiation on Synthesis of Hard and Superhard Films


Article Preview

This article summarizes briefly our recent research on low-temperature synthesis of TiN, TiN/Cu and TiN/Si films by using inductively coupled plasma assisted magnetron sputtering method. It is shown that the incorporation of high-flux low-energy ion irradiation during deposition strongly affects film growth, structure evolution, morphology and mechanical properties. A main attention is devoted to the synthesis of superhard nanocomposite films at a low deposition temperature. In both TiN/Cu and TiN/Si films the maximum hardness reaches a value higher than 40 GPa.



Key Engineering Materials (Volumes 373-374)

Main Theme:

Edited by:

M.K. Lei, X.P. Zhu, K.W. Xu and B.S. Xu




Z. G. Li et al., "Effect of Low-Energy Ion Irradiation on Synthesis of Hard and Superhard Films ", Key Engineering Materials, Vols. 373-374, pp. 172-175, 2008

Online since:

March 2008




[1] S. Veprek, S. Reiprich and Li Shizhi: Appl. Phys. Lett. Vol. 66 (1995), p.2640.

[2] J. Musil, P. Zeman, H. Hrubý and P.H. Mayrhofer: Surf. Coat. Technol. Vol. 120/121 (1999), p.179.

[3] M. Diserens, J. Patscheider and F. Lévy: Surf: Coat. Technol. Vol. 120-121 (1999), p.158.

[4] L. Rebouta, C.J. Tavares, R. Aimo, Z. Wang, K. Pischow, E. Alves, T.C. Rojas and J.A. Odriozoda: Surf. Coat. Technol. Vol. 133-134 (2000), p.234.

[5] H. Watanabe, Y. Sato, C. Nie, A. Ando, S. Ohtani and N. Iwamoto: Surf. Coat. Technol. Vol. 169-170 (2003), p.452.

[6] K.H. Kim, S. Choi and S. Yoon: Surf. Coat. Technol. Vol. 298 (2002), p.243.

[7] P.J. Martin and A. Bendavid: Surf. Coat. Technol., Vol. 163-164 (2003), p.245.

[8] J. S. Colligon, V. Vishnyakov, R. Valizadeh, S. E. Donnelly and S. Kumashiro: Thin Solid Films Vol. 485 (2005), p.148.

DOI: https://doi.org/10.1016/j.tsf.2005.03.036

[9] P. Patsalas, C. Gravalidis and S. Logothetidis: J. Appl. Phys. Vol. 96 (2004), p.6234.

[10] I. Petrov, P.B. Barna, L. Hultman and J.E. Greene: J. Vac. Sci. Technol. A 21 (2003), p. S117.

[11] Z. Li, S. Miyake and Y. Wu: Jpn. J. Appl. Phys. Vol. 45 (2006), p.5178.

[12] Z. Li, M. Mori, and S. Miyake: Jpn. J. Appl. Phys. Vol. 42 (2003), p.7086.

[13] J.E. Greene, J. -E. Sundgren, L. Hultman, I. Petrov and D.B. Bergstrom: Appl. Phys. Lett. Vol. 67 (1995), p.2928.

[14] Z. Li, H. Yu, Y. Wu and S. Miyake: Acta Metallurgica Sinca Vol. 42 (2006), p.993.

[15] Z.G. Li, S. Miyake, M. Kumagai T. Saito and Y. Muramatsu: Surf. Coat. Technol. Vol. 183 (2004), p.62.

[16] Z. Li, S. Miyake and Y. Wu: Jpn. J. Appl. Phys. Vol. 45 (2006), p.7866.

Fetching data from Crossref.
This may take some time to load.